Product Description
Product Description
Dry screw vacuum pump, is the use of a pair of screw, made in the pump shell synchronous high-speed reverse rotation of the effects of the suction and exhaust and suction device, 2 screw fine dynamic balancing correction, and is supported by bearings, is installed in the pump shell, between screw and screw has a certain gap, so the pump work, no friction between each other, smooth running, low noise, Working chamber without lubricating oil, therefore, dry screw pump can remove a lot of steam and a small amount of dust gas occasions, higher limit vacuum, lower power consumption, energy saving, maintenance-free and other advantages.Dry Oil-Free Air Cooling Screw Vacuum Pump ,This is an advanced and widely used vacuum pump at present, It is 1 of the best-selling products of our company.
It adopts explosion-proof motor with high configuration, It has the characteristics of low noise, no oil and pollution, clean and high vacuum, simple and convenient use, operation and maintenance, Widely used in many industries, For example, oil and gas recovery, vacuum coating, biomedicine, food processing, single crystal furnace, vacuum forming, vacuum melting, electronic photovoltaic, semiconductor synthesis and many other industries are used.
The dry oil-free screw vacuum pump produced by our company is divided into air cooling and water cooling according to the extraction rate, and there are many models for you to choose.
Our Advantages
There is no medium in the working chamber, which can obtain a clean vacuum.
. No clearance between rotating parts, high speed operation, small overall volume.
There is no compression in the gas, suitable for extraction of coagulable gas.
Can remove a lot of steam and a small amount of dust gas occasions.
. High vacuum, the ultimate vacuum up to 1 Pa.
Screw material is high strength special material, material density, wear resistance, stable performance.
No friction rotating parts, low noise.
. Simple structure, convenient maintenance.
Wider range of use: corrosive environment can be used.
No oil consumption, no water.
Pump gas directly discharged from the pump body, no pollution of water, no environmental pressure, more convenient gas recovery.
It can be composed of oil-free unit with Roots pump and molecular pump.
Typical Use
——Oil and gas recovery. ——Biological medicine ——Food Processing —— Single crystal furnace
——Vacuum forming ——Vacuum flame refining ——Electronic photovoltaic. ——Semiconductor synthesis
Product Parameters
| Type (Air cooled series) |
Basic parameters | ||||||||
| Pumping speed (m3/h) |
Presure limit(Pa) | Power (kW) | revolution (rpm) | Inlet caliber (mm) |
outlet caliber (mm) | Pump head weight (kg) |
noise dB(A) | Overall dimension (length*width*height) (mm) |
|
| LG-10 | 10 | ≤5 | 0.75 | 2730 | KF16 | KF16 | 30 | ≤ 72 | 655x260x285 |
| LG-20 | 20 | ≤5 | 1.1 | 2840 | KF25 | KF25 | 55 | ≤72 | 720x305x370 |
| LG-50 | 50 | ≤10 | 2.2 | 2850 | KF40 | KF40 | 90 | ≤75 | 920x350x420 |
| LG-70 | 70 | ≤30 | 3 | 2850 | KF40 | KF40 | 110 | ≤75 | 910x390x460 |
| LG-90 | 90 | ≤30 | 4 | 2870 | KF50 | KF50 | 125 | ≤80 | 1000x410x495 |
Characteristic Curve
Detailed Photos
General Manager Speech
Deeply cultivate the vacuum technology, and research,develop and manufacture the vacuum equipment to provide the best solution in the vacuum field and make the vacuum application easier.
Company Profile
ZheJiang Kaien Vacuum Technology Co., Ltd. is a high-tech enterprise integrating R & D, production and operation of vacuum equipment. The company has strong technical force, excellent equipment and considerate after-sales service. The product manufacturing process is managed in strict accordance with IS09001 quality system. It mainly produces and sells screw vacuum pump, roots pump, claw vacuum pump, runoff vacuum pump, scroll pump, water ring vacuum pump, vacuum unit and other vacuum systems.
New plant plHangZhou
The company’s products have been for a number of food, medicine, refrigeration, drying plants and a number of transformer related equipment manufacturers for vacuum equipment. The products are widely used in vacuum drying and dehydration, kerosene vapor phase drying, vacuum impregnation, vacuum metallurgy, vacuum coating, vacuum evaporation, vacuum concentration, oil and gas recovery, etc.
High precision machining equipment
The company cooperates with many scientific research institutions and universities, such as ZheJiang University, China University of petroleum, ZheJiang Institute of mechanical design, etc.with colleges and universities to research and develop core technologies, and owns dozens of independent intellectual property patents.Our technology is leading, the product quality is stable, the product has a good reputation in China’s domestic market, is sold all over the country, and is exported to Europe, America, Africa, the Middle East and Southeast Asia,We adhering to the basic tenet of quality, reputation and service, the company takes leading-edge technology of vacuum pump as its own responsibility, and wholeheartedly serves customers of vacuum equipment application in various industries with rigorous working attitude and professional working style.
Product quality wins consumer cooperation
In shipment
ISO 9001
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| After-sales Service: | Lifetime Paid Service |
|---|---|
| Warranty: | One Year |
| Oil or Not: | Oil Free |
| Structure: | Screw |
| Exhauster Method: | Entrapment Vacuum Pump |
| Vacuum Degree: | High Vacuum |
| Customization: |
Available
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What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?
Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:
Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.
Here are some key roles of vacuum pumps in semiconductor manufacturing:
1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.
2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.
3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.
4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.
5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.
6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.
7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.
8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.
Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.
Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.
Can Vacuum Pumps Be Used in the Production of Solar Panels?
Yes, vacuum pumps are extensively used in the production of solar panels. Here’s a detailed explanation:
Solar panels, also known as photovoltaic (PV) panels, are devices that convert sunlight into electricity. The manufacturing process of solar panels involves several critical steps, many of which require the use of vacuum pumps. Vacuum technology plays a crucial role in ensuring the efficiency, reliability, and quality of solar panel production. Here are some key areas where vacuum pumps are utilized:
1. Silicon Ingot Production: The first step in solar panel manufacturing is the production of silicon ingots. These ingots are cylindrical blocks of pure crystalline silicon that serve as the raw material for solar cells. Vacuum pumps are used in the Czochralski process, which involves melting polycrystalline silicon in a quartz crucible and then slowly pulling a single crystal ingot from the molten silicon. Vacuum pumps create a controlled environment by removing impurities and preventing contamination during the crystal growth process.
2. Wafering: After the silicon ingots are produced, they undergo wafering, where the ingots are sliced into thin wafers. Vacuum pumps are used in wire saws to create a low-pressure environment that helps to cool and lubricate the cutting wire. The vacuum also assists in removing the silicon debris generated during the slicing process, ensuring clean and precise cuts.
3. Solar Cell Production: Vacuum pumps play a significant role in various stages of solar cell production. Solar cells are the individual units within a solar panel that convert sunlight into electricity. Vacuum pumps are used in the following processes:
– Diffusion: In the diffusion process, dopants such as phosphorus or boron are introduced into the silicon wafer to create the desired electrical properties. Vacuum pumps are utilized in the diffusion furnace to create a controlled atmosphere for the diffusion process and remove any impurities or gases that may affect the quality of the solar cell.
– Deposition: Thin films of materials such as anti-reflective coatings, passivation layers, and electrode materials are deposited onto the silicon wafer. Vacuum pumps are used in various deposition techniques like physical vapor deposition (PVD) or chemical vapor deposition (CVD) to create the necessary vacuum conditions for precise and uniform film deposition.
– Etching: Etching processes are employed to create the desired surface textures on the solar cell, which enhance light trapping and improve efficiency. Vacuum pumps are used in plasma etching or wet etching techniques to remove unwanted material or create specific surface structures on the solar cell.
4. Encapsulation: After the solar cells are produced, they are encapsulated to protect them from environmental factors such as moisture and mechanical stress. Vacuum pumps are used in the encapsulation process to create a vacuum environment, ensuring the removal of air and moisture from the encapsulation materials. This helps to achieve proper bonding and prevents the formation of bubbles or voids, which could degrade the performance and longevity of the solar panel.
5. Testing and Quality Control: Vacuum pumps are also utilized in testing and quality control processes during solar panel production. For example, vacuum systems can be used for leak testing to ensure the integrity of the encapsulation and to detect any potential defects or leaks in the panel assembly. Vacuum-based measurement techniques may also be employed for assessing the electrical characteristics and efficiency of the solar cells or panels.
In summary, vacuum pumps are integral to the production of solar panels. They are used in various stages of the manufacturing process, including silicon ingot production, wafering, solar cell production (diffusion, deposition, and etching), encapsulation, and testing. Vacuum technology enables precise control, contamination prevention, and efficient processing, contributing to the production of high-quality and reliable solar panels.
What Is a Vacuum Pump, and How Does It Work?
A vacuum pump is a mechanical device used to create and maintain a vacuum or low-pressure environment within a closed system. Here’s a detailed explanation:
A vacuum pump operates on the principle of removing gas molecules from a sealed chamber, reducing the pressure inside the chamber to create a vacuum. The pump accomplishes this through various mechanisms and techniques, depending on the specific type of vacuum pump. Here are the basic steps involved in the operation of a vacuum pump:
1. Sealed Chamber:
The vacuum pump is connected to a sealed chamber or system from which air or gas molecules need to be evacuated. The chamber can be a container, a pipeline, or any other enclosed space.
2. Inlet and Outlet:
The vacuum pump has an inlet and an outlet. The inlet is connected to the sealed chamber, while the outlet may be vented to the atmosphere or connected to a collection system to capture or release the evacuated gas.
3. Mechanical Action:
The vacuum pump creates a mechanical action that removes gas molecules from the chamber. Different types of vacuum pumps use various mechanisms for this purpose:
– Positive Displacement Pumps: These pumps physically trap gas molecules and remove them from the chamber. Examples include rotary vane pumps, piston pumps, and diaphragm pumps.
– Momentum Transfer Pumps: These pumps use high-speed jets or rotating blades to transfer momentum to gas molecules, pushing them out of the chamber. Examples include turbomolecular pumps and diffusion pumps.
– Entrapment Pumps: These pumps capture gas molecules by adsorbing or condensing them on surfaces or in materials within the pump. Cryogenic pumps and ion pumps are examples of entrainment pumps.
4. Gas Evacuation:
As the vacuum pump operates, it creates a pressure differential between the chamber and the pump. This pressure differential causes gas molecules to move from the chamber to the pump’s inlet.
5. Exhaust or Collection:
Once the gas molecules are removed from the chamber, they are either exhausted into the atmosphere or collected and processed further, depending on the specific application.
6. Pressure Control:
Vacuum pumps often incorporate pressure control mechanisms to maintain the desired level of vacuum within the chamber. These mechanisms can include valves, regulators, or feedback systems that adjust the pump’s operation to achieve the desired pressure range.
7. Monitoring and Safety:
Vacuum pump systems may include sensors, gauges, or indicators to monitor the pressure levels, temperature, or other parameters. Safety features such as pressure relief valves or interlocks may also be included to protect the system and operators from overpressure or other hazardous conditions.
It’s important to note that different types of vacuum pumps have varying levels of vacuum they can achieve and are suitable for different pressure ranges and applications. The choice of vacuum pump depends on factors such as the required vacuum level, gas composition, pumping speed, and the specific application’s requirements.
In summary, a vacuum pump is a device that removes gas molecules from a sealed chamber, creating a vacuum or low-pressure environment. The pump accomplishes this through mechanical actions, such as positive displacement, momentum transfer, or entrapment. By creating a pressure differential, the pump evacuates gas from the chamber, and the gas is either exhausted or collected. Vacuum pumps play a crucial role in various industries, including manufacturing, research, and scientific applications.
editor by CX 2024-04-16
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