High Vacuum Molecular Pump

High Vacuum Molecular Pump

The turbo molecular pump is a mechanical vacuum pump with a rotor manufactured of a quickly rotating turbine blade&comma helical groove&comma or a mix of the two&period The fuel molecules enter the turbo molecular pump and collide with the surface area of the rotors creating kinetic vitality triggering the fuel molecules to move toward the turbomolecular pump exhaust&period of time

The pumps provide entire magnetic levitation rotor&comma which offers a clean&comma reputable vacuum for present day semiconductor and solar industries&time period It attributes a 5 axis magnetic bearing and 50 percent rack controller requiring no tuning or battery backup&comma high compression&comma and corrosion resistant&period

Product F-250&sol1500 FF-250&sol1600 F-250&sol1800
Potential&lparl&sols&rpar 1500 1600 1800
H2 Compression Ratio 3× 10 3 3× ten 3 3× 10 3
N2 Compression Ratio 1× ten 8 1× 10 eight 1× ten eight
Greatest Pressure&lparPa&rpar ≤ 6× 10 -6 ≤ 1× ten -6 ≤ 1× 10 -6
Rotation Velocity&lparRPM&rpar 21000 27000 27000
Run up time&lparmin&rpar < 8 < 8 < 8
Outlet Flange KF50&lparDN50 ISO-KF&rpar KF50&lparDN50 ISO-KF&rpar KF40&lparDN40 ISO-KF&rpar
Inlet Flange LF250&lparDN250 ISO-K&rpar                        LF250&lparDN250 ISO-K&rpar                          LF250&lparDN250 ISO-K&rpar 
Bearing CZPT Ceramic bearing Ceramic bearing
Backing pump&lparl&sols&rpar 15 fifteen fifteen
CZPT water&lparº C&rpar ≤ 25 ≤ twenty five ≤ 25
Heating T&lparº C&rpar ≤ 100 ≤ 100 ≤ 100
Ambient T&lparº C&rpar five~forty 5~40 5~forty
Oil stuffed&lparml&rpar 150 one hundred fifty Grease lubricated
Put in CZPTation vertical&pm 5° vertical&pm 5º any
Fat&lparkg&rpar 60 47 forty two

High Vacuum Molecular Pump