The turbo molecular pump is a mechanical vacuum pump with a rotor manufactured of a quickly rotating turbine blade&comma helical groove&comma or a mix of the two&period The fuel molecules enter the turbo molecular pump and collide with the surface area of the rotors creating kinetic vitality triggering the fuel molecules to move toward the turbomolecular pump exhaust&period of time
The pumps provide entire magnetic levitation rotor&comma which offers a clean&comma reputable vacuum for present day semiconductor and solar industries&time period It attributes a 5 axis magnetic bearing and 50 percent rack controller requiring no tuning or battery backup&comma high compression&comma and corrosion resistant&period
Product | F-250&sol1500 | FF-250&sol1600 | F-250&sol1800 |
Potential&lparl&sols&rpar | 1500 | 1600 | 1800 |
H2 Compression Ratio | 3× 10 3 | 3× ten 3 | 3× 10 3 |
N2 Compression Ratio | 1× ten 8 | 1× 10 eight | 1× ten eight |
Greatest Pressure&lparPa&rpar | ≤ 6× 10 -6 | ≤ 1× ten -6 | ≤ 1× 10 -6 |
Rotation Velocity&lparRPM&rpar | 21000 | 27000 | 27000 |
Run up time&lparmin&rpar | < 8 | < 8 | < 8 |
Outlet Flange | KF50&lparDN50 ISO-KF&rpar | KF50&lparDN50 ISO-KF&rpar | KF40&lparDN40 ISO-KF&rpar |
Inlet Flange | LF250&lparDN250 ISO-K&rpar | LF250&lparDN250 ISO-K&rpar | LF250&lparDN250 ISO-K&rpar |
Bearing | CZPT | Ceramic bearing | Ceramic bearing |
Backing pump&lparl&sols&rpar | 15 | fifteen | fifteen |
CZPT water&lparº C&rpar | ≤ 25 | ≤ twenty five | ≤ 25 |
Heating T&lparº C&rpar | ≤ 100 | ≤ 100 | ≤ 100 |
Ambient T&lparº C&rpar | five~forty | 5~40 | 5~forty |
Oil stuffed&lparml&rpar | 150 | one hundred fifty | Grease lubricated |
Put in CZPTation | vertical&pm 5° | vertical&pm 5º | any |
Fat&lparkg&rpar | 60 | 47 | forty two |